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1200°C PE/CVD Furnace w/ RF Generator, Gas Mix & Pumping System

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SKU: STF1200cvd Category:




STF1200 series Chemical Vapor Deposition (CVD) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) multi-zone split tube furnaces feature the famous Kanthal® (Sweden) wire heating elements embedded in high quality Mitsubishi® (Japan) alumina fiber insulation. All steel dual-layer housing ensures durability and helps minimize heat loss to exterior surface.

Furnace operation is controlled by Shimaden® (Japan) 40-segment digital controller with built-in RS485 digital communications port and USB adaptor, allowing the user to connect to a PC for remote control and monitoring of the furnace. You can also save or export test results.

All our furnaces are CE compliant.







  • Compact, portable and lightweight design.
  • Lower processing temperatures required compare to conventional CVDs.
  • Film stress can be controlled by high/low frequency mixing techniques.
  • Split furnace chamber for fast and easy tube access.
  • Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.
  • Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.
  • Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)
  • Built-in amp meter and dual voltmeters for easy monitoring and troubleshooting.
  • Built-in computer interface.
  • Long life type K thermocouple.
  • Slidable furnace option gives you ultra fast cooling rates


  • Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller’s manual) or when the thermocouple is broken or malfunctions.
  • Power failure protection resumes furnace operation right after the point of failure when power is reestablished.

Warning! NEVER fill furnace with explosive gases, including Hydrogen, Carbon Monoxide and Methane.

Furnace, vacuum pump and gas mixing system specifications

 Tube material  Quartz
 Heating element  Kanthal® (Sweden) A1 2.0 resistance coil wire
 Max. vs constant working temperatures  1200°C max. and 1100°C constant
 Thermo couple type  K
 Refractory lining  Mitsubishi® (Japan) 1500 grade fiber alumina
 Temperature controller  Shimaden® (Japan) fp93 with 4 patterns and 40 segments
 (ie. 4 x 10 segments or 2 x 20 segments)
 Maximum heating rate    < 30°C / min
 Temperature controller precision
 +/- 1°C (+/- 1.8°F)
 Vacuum sealing flange kit

 Stainless steel vacuum sealing flanges with one vacuum gauge,
two valves and four thermal ceramic blocks.      

 Electrical requirements
 208-240VAC, 50/60 Hz, single phase
 Single-zone 1200°C max furnace detail specs
 Click here for more info
 Dual-zone 1200°C max furnace detail specs
 Click here for more info
 Three-zone 1200°C max furnace detail specs
 Click here for more info
 Gas mixing system detail specs
 Click here for more info
 Vacuum pump detail specs  Click here for more info
 Download  Product brochure

 RF generator specifications

 Electrical requirements  208-240 volts 50/60 Hz
 Output power  5 to 500 watts, adjustable in +/-1% step
 RF frequency
 13 MHz with +/-0.005% stability
 Reflection power
 200 watts max.
 Matching  Automatic
 RF output port
 50 Ω, N-type, female
 Cooling  Air

How to Program Across International Furnaces


Standard Package


Part description    






Part image 


 STF1200 split tube furnace
 1 set
 Multi-channel gas supply system 1 set
 Plasma RF power supply (optional)
1 set
 Vacuum pump and enclosure (optional)
 1 set  
 Quartz tube
1 pc

 Analog flow meter 1 pc
 Stainless steel vacuum sealing flanges w/ pressure meter 
 1 set

 Stainless steel hook
 1 pc

 Alumina ceramic thermal block
 2 pairs

 Thermal gloves  1 pair

 Spare fuse 2 pcs

 USB/RS485 computer interface kit  1 set

 Furnace and Shimaden controller manual 2 pcs

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